ASI offers larger custom stages in addition to our standard 100 x 100 mm (4 x 4 inch) models. Larger travel distances may be required for large microscopes, for semiconductor inspection, and for other demanding applications. By utilizing ASI's proven line of closed-loop DC servomotor electronics, these larger stages can be configured with a wide range of speed and resolution options. (Gantry stages are also available.)
| Model |
XY Length of Travel |
| MS-6600 |
150 x 150 mm (6 x 6 inches) |
| MS-8000 |
200 x 200 mm (8 x 8 inches) |
| MS-10000 |
250 x 250 mm (10 x 10 inches) |
| MS-12000 |
300 x 300 mm (12 x 12 inches) |
Features
- Closed-loop DC servo control of the X and Y axes for precise positioning
- Wide dynamic speed range with XY joystick control
- Backlit LCD display shows axis coordinates
- "Zero" and "Home" button for simple stand-alone operations
- Compact ergonomic tabletop control unit size is
9 cm x 23 cm x 16½ cm (3" x 9" x 6") [H x W x D]
- Microprocessor control with RS-232 serial and USB communications
- Proven operation with many popular software packages
Specifications
With 3.7:1 Gearhead Motor,
and with Lead Screw Pitch: |
Rotary
Encoder
Resolution |
RMS
Repeatability
(Typical) |
Maximum
Speed |
| 25.40 mm (Ultra-coarse) |
3.3 µm |
< 4 µm |
480 mm/sec |
| 12.70 mm (Super-coarse) |
1.7 µm |
< 2 µm |
240 mm/sec |
| 6.35 mm (Standard) |
0.84 µm |
< 1 µm |
120 mm/sec |
| 1.59 mm (Fine) |
0.21 µm |
< 1 µm |
30 mm/sec |
With 141:1 Gearhead Motor,
and with Lead Screw Pitch: |
Rotary
Encoder
Resolution |
RMS
Repeatability
(Typical) |
Maximum
Speed |
| 25.40 mm (Ultra-coarse) |
88 nm |
< 3 µm |
28 mm/sec |
| 12.70 mm (Super-coarse) |
44 nm |
< 1.5 µm |
14 mm/sec |
| 6.35 mm (Standard) |
22 nm |
< 0.7 µm |
7 mm/sec |
| 1.59 mm (Fine) |
5.5 nm |
< 0.5 µm |
1.75 mm/sec |
* Standard Lead Screw Accuracy is 0.25 µm per millimeter
Optional Linear Encoders - X and Y-axis Linear Encoders incorporated into the stage plates for ultra-precise positioning and high-resolution repeatability.
| Linear Encoder Resolution |
Scale Accuracy |
10 nm (up to 50 mm/sec)
20 nm (up to 100 mm/sec)
50 nm (up to 250 mm/sec)
100 nm (up to 500 mm/sec) |
± 3 µm per length of scale |
* Typical RMS Repeatability with Linear Encoders: 1 micron
