The MS-2000 Low Mass XY stage has been specifically designed to reach thermal equilibrium faster with 3/4 the mass of a regular stage while retaining ASI’s legendary precision. The stage retains the high resolution, and high repeatability, of all ASI microscope stages. All axes derive their precise control through the use of closed-loop DC servomotors employing high-resolution rotary encoders for positioning feedback. By using closed-loop control of the stage position, there is no chance that the stage will become lost, as can occur with open-loop micro-stepped stages after a number of moves and direction changes. The MS-2000 XY stage utilizes crossed-roller slides, high-precision lead screws, and zero-backlash miniature geared DC servomotors for smooth and accurate motion. The microprocessor-controlled MS-2000 control unit provides for RS-232 and USB communication with a host computer.
|XY axis range of travel||100 mm x 100 mm|
|XY axis resolution (rotary encoder step)||0.022 μm|
|XY axis RMS repeatability||< 0.7 μm|
|XY axis maximum velocity||7 mm/sec|
|Lead Screw Pitch Options||Rotary Encoder Resolution||Maximum Speed|
|12.70 mm (Super-coarse)||44 nm||14 mm/sec|
|6.35 mm (Standard)||22 nm||7 mm/sec|
|1.59 mm (Fine)||5.5 nm||1.75 mm/sec|
|0.635 mm (Extra-fine)||2.2 nm||0.7 mm/sec|
|XY||10 nm||± 3 μm per length of scale|
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