Dear User, your stage has been optimized for small move sizes (100nm-10nm). Various physical and firmware settings were modified to accomplish this. To achieve 10nm moves we found the following settings helped.
Kp x=250 y=250 Ki x=5 y=5 Ma x=2 y=2
While these settings will help for submicron moves, they may cause instability and jitter. If you notice this feel free to revert one or more of these settings back to their defaults.
First, Ma x=0 y=0
And if the instability and jitter persists
Kp x=75 y=75 Ki x=1 y=1
If you have further questions please contact us at support[at]asiimging[dot]com or thru 1-541-461-8181